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01 ·Fabrication & Packaging·★ MEMBER·10 min read EUV Lithography — The Madness of Making 13.5nm Light Light at 13.5nm is absorbed by air and by every lens material there is. So why did the semiconductor industry build an entire industry around it? Tin plasma sources, optics with no lenses at all, and the cost arithmetic against multi-patterning — explained from zero.